15xx
In in the 16th century in England and France, full diving suits made of leather were used to depths of 60 feet. Air was pumped down from the surface with the aid of manual pumps. Soon helmets were made of metal and divers went deeper. These diving helmets were already some sort of rebreather, but 'still' surface supplied and without scrubber.
1680
Giovanni Borelli wanted to build a closed breathing circuit. His idea (that could not functionate) was to recuirulating air through a copper tube, cooled by sea water, which was assumed, would condense all impurities at the inside of the tube.
1726
Stephen Hale designed the first scrubber: a flannel liner, soaked in sea salt and tarter, used in a helmet for mine disasters.
1774
first known Ideas to build autonomous rebreathers that could really functionate.
1876
Henry Fleuss, an English merchant marine officer (from Germany) , began to develop an oxygen rebreather. He used a watertight rubber face mask and a breathing bag connected to a copper oxygen tank. As an absorber for the carbon dioxide, he used a rope yarn, which was soaked in a solution of caustic potash. First he tested his new device by remaining in a watertank for about one hour. Later he walked along a creek bed at a depth of 5.5m, so Henry Fleuss was the first SCUBA-Diver. This same system was used several times to rescue mine workers in flooded tunnels. Further development leads to an apparatus, thats used for submarine escape (1905).
1879
Fleuss builds a Mining-Rescue Rebreather for Siebe/Gorman
1881
a special scrubber for rebreathers is patended by Khotinsky and Simon Lake, using a barium hydroxide as a chemical to remove CO2.
1904
Siebe Gorman patents Oxylite, a potassium- and sodium-peroxide mixture that liberates oxygen on contact with water.
1907
1911
1912
1913
Dräger performs Deepdiving tests with rebreathers, on 17.July a successful 40minute wet-chamber dive with a maximum pressure of 9bar (~80m) is logged.
1914
Dräger: selfmixing (on the fly) (Oxygen+Air) Nitrox-Rebreather for max. 40m.
1926
Dräger-Bade-Tauchretter (=Rebreather for recreational SCUBA-diving and lifeguard-usage)
1928
Inhabad: several Gas- und Naszogen- Rebreather for diving applications
1936
A descendant of the Fleuss SCUBA, the Davis Lung, is used by the
1939
Dr. Christian Lambertsen: Lambertsen Amphibious Respiratory Unit (LARU).
1941
1942
1953
Barakuda Delphin I
1954
1957
IDA-57 (110KB)
1959
1964
IDA-64 (->Valeri)
1968
Electrolung (820KB spread over several pages)
Dräger LAR II
1969
1970
BioMarine CCR-1000
Dräger Travox 120 (Fire Fighter - Rebreather)
O2 Rebreather with shoulder-mounted CL's, Brand-Name unknown
1971
IDA-71 (260KB)
1972
BioMarine Mark 15
1973
BioMarine BioPak-45
1974
BioMarine BioPak-60
1975
1976
BioMarine NM-2
1977
BioMarine NM-6
1977
BioMarine NM-6
1978
Interspiro ACSC
1979
BioMarine Mark 16
1982
Interspiro Oxydive
198x
BioMarine Mark 15.5
1984
BioMarine BioPak-240
Dräger Tieftauchsystem CCBS for operating depths of max. 600m
1985
IDA-85 (->Valeri)
1991
1992
Interspiro DCSC
1993
BioMarine BMR-500
1994
1995
Dräger-Atlantis (1998 renamed in Dräger-Dolphin)
Grand Bleu: Fieno
Cis-Lunar Mk 4
Oceanic Phibian, later produced as Undersea Technologies UT240 and UT180
1996
1997
1998
Buddy Inspiration (74KB)
1999
Dräger-Ray (171KB)
Dräger LAR VII (82KB)
Mares Azimuth (182KB) (sorry, the main text is still 
)
2000
Airway Cora (230KB) (sorry, this text is still )
Buddy Evolution
2001
Halcyon RB80
Rebreather-Index